Product

Product Introduction Product Introduction

CVD Conditioner

Pad-refreshing consumable that uses CVD method to prevent diamond from shedding and minimize performance difference among products

Target
Semiconductor Chip-Maker (Non-memory, Memory (DRAM/FLASH), Foundries)
Product Name
CVD Conditioner
Standard
4.25” (Stainless Steel, CVD Diamond Coating)
Application
Semiconductor CMP process(ILD, STI, Metal, TSV, Buffing, Barrier, Poly, Gate)
No.
6804.21-0000
Features
Stable Pad Roughness, Long pad life time, Small debris size & Amount
031-000-0000