Product

Product Introduction Product Introduction

BAR

Pad-refreshing consumable for removal of polyurethane pad surface clogging

Target
Semiconductor Chip-Maker (LSI, Memory(DRAM/FLASH), Foundries)
Product Name
BAR
Standard
4.25" (Stainless Steel, Diamond-Nickel Bonding)
Application
Semiconductor CMP process (ILD, STI, Metal)
No.
6804.21-0000
Features
Stable pad roughness, long conditioner life time
031-000-0000